Secondary Ion Mass Spectrometer (SIMS), Electron Probe Microanalysis (EPMA), Low energy Electron induced X-ray Emission Spectrometry (LEXES) and Atom Probe Tomography (APT).

CAMECA Atom Probe Technology Center 
5500 Nobel Drive
Madison, WI  53711
USA
Phone: 1-608-274-6880
Fax: 1-608-442-0622
Website: http://www.cameca.com/

Other possibilities at AMETEK